Assessment of electrodeposited nickel-iron alloys for microsystem technology applications

The electrodeposition of nickel-iron-alloys from a sulfate electrolyte with different additives ist described. As deposited alloys contained between 10 and 36 % of iron and were charaterized by hardness, grain size and lattize parameter. The thermal stability of the different alloys by exposing them up to 800 °C is investigated by cross sections and the mesurement of hardness in order to prove the suitability for usage in microfabrication.


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