About Dr. Peter Schlossmacher

FEI Deutschland GmbH, An der Welle 4, 60322 Frankfurt/Main, Germany, Email: peter.schlossmacher@fei.com

Assessment of electrodeposited nickel-iron alloys for microsystem technology applications

Fig. 6: Two series of optical micrographs...

The electrodeposition of nickel-iron-alloys from a sulfate electrolyte with different additives ist described. As deposited alloys contained between 10 and 36 % of iron and were charaterized by hardness, grain size and lattize parameter. The thermal stability of the different alloys by exposing them up to 800 °C is investigated by cross sections and the mesurement of hardness in order to prove the suitability for usage in microfabrication.